2020-03-17
2020-03-09
substrats pour le dépôt de film de nitrure iii-v
cristal |
structure |
m.p. |
densité |
désaccord de treillis gan |
dilatation thermique |
technologie de croissance & taille max |
substrat standard taille (mm) |
o c |
g / cm 3 |
(dix -6 / k) |
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sic (6h par exemple) |
hexagonal |
~ 2700 |
3,21 |
3,5% atori. |
10,3 |
cvd |
Ø2 \"x 0,3, Ø3\" x0,3 |
a = 3,073 Å |
\u0026 emsp; |
\u0026 emsp; |
20x20x0.3,15x15x0.3 |
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c = 15.117 Å |
\u0026 emsp; |
Ø3 \" |
10x10x0.3,5x5x0.3 |
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\u0026 emsp; |
subl. |
\u0026 emsp; |
1 côté epi poli |
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Al 2 o 3 |
hexagonal |
2030 |
3,97 |
14% atori. |
7,5 |
cz |
Ø50 x 0,33 |
a = 4,775 Å |
\u0026 emsp; |
Ø25 x 0,50 |
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c = 12,99 Å |
Ø2 \" |
10x10x0.5 |
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\u0026 emsp; |
\u0026 emsp; |
Epi 1 ou 2 faces polies |
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Lialo 2 |
tétragonale |
1900 ~ |
2,62 |
1,4% atori. |
/ |
cz |
10x10x0.5 |
a = 5,17 Å |
Ø20 mm |
Epi 1 ou 2 faces polies |
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c = 6,26 Å |
\u0026 emsp; |
\u0026 emsp; |
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ligao 2 |
orthor. |
1600 |
4,18 |
0,2% atori. |
/ |
cz |
10x10x0.5 |
a = 5.406 Å |
Ø20 mm |
Epi 1 ou 2 faces polies |
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b = 5,012Å |
\u0026 emsp; |
\u0026 emsp; |
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c = 6,379 Å |
\u0026 emsp; |
\u0026 emsp; |
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mgo |
cubique |
2852 |
3,58 |
3% atori. |
12,8 |
flux |
2 \"x2\" x 0.5 mm, Ø2 \"x 0.5 mm |
a = 4,216 Å |
\u0026 emsp; |
1 \"x1\" x 0.5 mm, Ø1 \"x 0.5 mm |
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\u0026 emsp; |
Ø2 \" |
10 x10x0,5 mm |
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Epi 1 ou 2 faces polies |
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mgal 2 o 4 |
cubique |
2130 |
3.6 |
9% atori. |
7.45 |
cz |
Ø2 \"x 0.5 |
a = 8.083 Å |
Ø2 \" |
10x10x0.5 |
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\u0026 emsp; |
\u0026 emsp; |
Epi 1 ou 2 faces polies |
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zno |
hexag. |
1975 |
5.605 |
2,2% atori. |
2,9 |
hydro-thermique |
20x20x0.5 |
a = 3,325 Å |
20mm |
Epi 1 ou 2 faces polies |
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c = 5,213 Å |
\u0026 emsp; |
\u0026 emsp; |
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gan |
hexagonal |
\u0026 emsp; |
6.15 |
\u0026 emsp; |
5,59 |
\u0026 emsp; |
10x10x0.475mm |
\u0026 emsp; |
\u0026 emsp; |
5x5x0.475mm |