2020-03-17
2020-03-09
substrats pour le dépôt de film de nitrure iii-v
cristal
structure
m.p.
densité
désaccord de treillis à gan
dilatation thermique
technologie de croissance & taille max
taille standard du substrat (mm)
o c
g / cm 3
(dix -6 / k)
sic
(6h par exemple)
hexagonal
~ 2700
3,21
3,5% atori.
10,3
cvd
Ø2 \"x 0,3, Ø3\" x0,3
a = 3,073 Å
\u0026 emsp;
\u0026 emsp;
20x20x0.3,15x15x0.3
c = 15.117 Å
\u0026 emsp;
Ø3 \"
10x10x0.3,5x5x0.3
\u0026 emsp;
subl.
\u0026 emsp;
1 côté epi poli
Al 2 o 3
hexagonal
2030
3,97
14% atori.
7,5
cz
Ø50 x 0,33
a = 4,775 Å
\u0026 emsp;
Ø25 x 0,50
c = 12,99 Å
Ø2 \"
10x10x0.5
\u0026 emsp;
\u0026 emsp;
Epi 1 ou 2 faces polies
Lialo 2
tétragonale
1900 ~
2,62
1,4% atori.
/
cz
10x10x0.5
a = 5,17 Å
Ø20 mm
Epi 1 ou 2 faces polies
c = 6,26 Å
\u0026 emsp;
\u0026 emsp;
ligao 2
orthor.
1600
4,18
0,2% atori.
/
cz
10x10x0.5
a = 5.406 Å
Ø20 mm
Epi 1 ou 2 faces polies
b = 5,012Å
\u0026 emsp;
\u0026 emsp;
c = 6,379 Å
\u0026 emsp;
\u0026 emsp;
mgo
cubique
2852
3,58
3% atori.
12,8
flux
2 \"x2\" x 0.5 mm, Ø2 \"x 0.5 mm
a = 4,216 Å
\u0026 emsp;
1 \"x1\" x 0.5 mm, Ø1 \"x 0.5 mm
\u0026 emsp;
Ø2 \"
10 x10x0,5 mm
Epi 1 ou 2 faces polies
mgal 2 o 4
cubique
2130
3.6
9% atori.
7.45
cz
Ø2 \"x 0.5
a = 8.083 Å
Ø2 \"
10x10x0.5
\u0026 emsp;
\u0026 emsp;
Epi 1 ou 2 faces polies
zno
hexag.
1975
5.605
2,2% atori.
2,9
hydro-thermique
20x20x0.5
a = 3,325 Å
20mm
Epi 1 ou 2 faces polies
c = 5,213 Å
\u0026 emsp;
\u0026 emsp;
gan
hexagonal
\u0026 emsp;
6.15
\u0026 emsp;
5,59
\u0026 emsp;
10x10x0.475mm
\u0026 emsp;
\u0026 emsp;
5x5x0.475mm