couche

Matériel

X

y tolérance de contrainte

PL

épaisseur

type

niveau

\u0026 emsp;

\u0026 emsp;

\u0026 emsp;

\u0026 emsp;

(ppm)

(nm)

(um)

\u0026 emsp;

(cm-3)

8

gaas

\u0026 emsp;

\u0026 emsp;

\u0026 emsp;

\u0026 emsp;

0.1

p

\u0026 gt; 2.00e19

7

gain (x) p

0,49

\u0026 emsp;

+/- 500

\u0026 emsp;

0,05

p

\u0026 emsp;

6

[al (x) ga] dans (y) p

0,3

0,49

+/- 500

\u0026 emsp;

1

p

\u0026 emsp;

5

gain (x) p

0,49

\u0026 emsp;

+/- 500

\u0026 emsp;

0.5

u / d

\u0026 emsp;

4

gaas (x) p

0,77

\u0026 emsp;

\u0026 emsp;

770

\u0026 emsp;

u / d

\u0026 emsp;

3

gain (x) p

0,49

\u0026 emsp;

+/- 500

\u0026 emsp;

0.5

u / d

\u0026 emsp;

2

[al (x) ga] dans (y) p

0,3

0,49

+/- 500

\u0026 emsp;

1

n

\u0026 emsp;

1

gaas

\u0026 emsp;

\u0026 emsp;

\u0026 emsp;

\u0026 emsp;

0.5

n

\u0026 emsp;

substrat gaas

\u0026 emsp;

\u0026 emsp;

\u0026 emsp;

\u0026 emsp;

\u0026 emsp;

n

\u0026 emsp;